Russia develops 11.2 nm EUV lithography system to rival ASML's technology

[Redaktion]

Russia is developing its own EUV lithography technology with an 11.2 nm wavelength approach, diverging from ASML's established 13.5 nm standard. The project, led by scientist Nikolay Chkhalo, aims to create more cost-effective machines with lower throughput than ASML.

https://www.notebookcheck.net/Russia-develops-11-2-nm-EUV-lithography-system-to-rival-ASML-s-technology.935627.0.html