Samsung has begun mass producing its 14nm DDR5 DRAM with cutting-edge EUV technology. Samsung's five-layer EUV process has allowed it to achieve the highest DDR5 DRAM bit density in the industry with 20% productivity enhancement. The DDR5 DRAM also draws up to 20% less power than the previous DRAM node.
https://www.notebookcheck.net/Samsung-starts-mass-producing-14nm-EUV-DDR5-DRAM.571802.0.html